Sensofar 3D Profilometry

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3D surface metrology describes the measurement and characterisation of micro- and nano-scale featuers on natural or manufactured surfaces. Sensofar Metrology provides high end non-contact 3D surface profilers based on complementary confocal, interferometry and focus variation techniques (thus ‘3-in-1’). As a result, the systems provide unrivalled versatility for optical measurements of structure and texture across varying surface scales, and even deliver areal surface roughness to ISO 25178 standards. From complete set-ups for industry, R&D and standards laboratories, to flexible and fast in-line metrology solutions with small footprint for production processes.

What are 3D Profilometry instruments capable of?

  • Combined Confocal (high aspect ratio samples)
  • Interferometry (ultimate axial resolution)
  • And Focus Variation (large structures)
  • No moving parts, for speed, stability and longevity

What are the main applications?

  • Energy and transportation
  • Microelectronics
  • Micro-manufacturing


  • S lynx – 3D Surface Profiler

    S lynx is a non-contact compact 3D surface profiler designed for use in industry and research. It has been designed…
  • S neox – 3D Optical Profilometer

    The S neox outperforms existing optical 3D profiling microscopes in terms of performance, functionality, efficiency and design, providing Sensofar with…






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