SmartSE – Cost Effective Spectroscopic Ellipsometer

Smart SE: a powerful and cost effective spectroscopic ellipsometer

The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements. It characterizes thin film thickness from a few Angstroms to 20 µm, optical constants (n,k), thin film structure properties (such as roughness, optical graded and anisotropic layers, etc), and the complete 16 element Mueller matrix.

The spectral range from 450 to 1000 nm is measured in a few seconds and ellipsometric data are analyzed using the DeltaPsi2 software platform.  DeltaPsi 2 provides advanced analysis with state-of the art ellipsometric modeling, as well as a more user friendly interface, known as AutoSoft, allowing the user to simply run pre-defined recipes with simple push button operation.

The Smart SE ellipsometer is a cost effective thin film tool with no compromise on features,  delivering research grade performance at an economical price. It provides an integrated vision system for accurate spot positioning, seven automated micro spots with size ranging down to a few tens of microns for measurement of small features, and the ability to measure the complete 16-element Mueller matrix in just a few seconds for the study of complex samples.

Key Features

  • Manually adjustable goniometer (45° to 90° in steps of 5°)
  • Manually adjustable sample stage (height and tilt)
  • Spectral range: 450-1000 nm
  • Fast acquisition time 1 – 10s

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Spectroscopic Ellipsometer for Thin Film Analysis

The Smart SE is an innovative spectroscopic ellipsometer for easy, fast and accurate characterization of thin films, from single to multi-layers.

Fast and Accurate

The CCD detector of the Smart SE acquires accurate ellipsometric data from 450 -nm to 1000 nm measurement duration ≥ 1 second


The optical heads of the Smart SE are mounted on a compact manual goniometer that allows data acquisition from 45° to 90° by steps of 5°

Unique Capabilities

  • MyAutoView vision system for accurate positioning of the spot on any opaque or transparent substrates
  • Seven automated micro spot sizes for measurements of patterned samples
  • Full Mueller matrix measurement capability to study anisotropic and depolarising samples

Thin Film Applications

  • Film thickness from a few Å to 15 µm
  • Optical constants (n, k)
  • Optical bang gap
  • Gradient, anisotropy and depolarisation

User Oriented Software Platform

Auto Soft Routine Mode

  • Auto Soft is an intuitive software that allows inexperienced users to acquire and analyse data in one push of a button
  • Four interfaces to control the system, run an experiment, manage the data and perform maintenance test
  • Predefined recipes are listed by applications and materials
  • Fitting and tabulated data are presented on the same screen for fast reading (goodness of fit, thickness, optical constants, band gap, composition)

DeltaPsi2 Advanced Mode

  • Over the last two decades, HORIBA Jobin Yvon DeltaPsi2 Ellipsometric software has acquired a brand equity and is recognised as one of the most advanced and powerful commercial ellipsometric software
  • Build your model to characterize anisotropic, depolarizing and graded samples
  • Customize existing dispersion functions with our unique User Defined Formula and fit new material properties
  • Export Recipes from DeltaPsi2 to AutoSoft for push button analysis




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