Description
Spectroscopic Ellipsometer for Thin Film Analysis
The Smart SE is an innovative spectroscopic ellipsometer for easy, fast and accurate characterization of thin films, from single to multi-layers.
Fast and Accurate
The CCD detector of the Smart SE acquires accurate ellipsometric data from 450 -nm to 1000 nm measurement duration ≥ 1 second
Flexible
The optical heads of the Smart SE are mounted on a compact manual goniometer that allows data acquisition from 45° to 90° by steps of 5°
Unique Capabilities
- MyAutoView vision system for accurate positioning of the spot on any opaque or transparent substrates
- Seven automated micro spot sizes for measurements of patterned samples
- Full Mueller matrix measurement capability to study anisotropic and depolarising samples
Thin Film Applications
- Film thickness from a few Å to 15 µm
- Optical constants (n, k)
- Optical bang gap
- Gradient, anisotropy and depolarisation
User Oriented Software Platform
Auto Soft Routine Mode
- Auto Soft is an intuitive software that allows inexperienced users to acquire and analyse data in one push of a button
- Four interfaces to control the system, run an experiment, manage the data and perform maintenance test
- Predefined recipes are listed by applications and materials
- Fitting and tabulated data are presented on the same screen for fast reading (goodness of fit, thickness, optical constants, band gap, composition)
DeltaPsi2 Advanced Mode
- Over the last two decades, HORIBA Jobin Yvon DeltaPsi2 Ellipsometric software has acquired a brand equity and is recognised as one of the most advanced and powerful commercial ellipsometric software
- Build your model to characterize anisotropic, depolarizing and graded samples
- Customize existing dispersion functions with our unique User Defined Formula and fit new material properties
- Export Recipes from DeltaPsi2 to AutoSoft for push button analysis
