Description
Why 3-in-1 technologies?
Single-technology systems are subject to a lack of versatility. When confronted with measurement tasks that push the boundaries of their physics based limitations, the only option is to manipulate the measurement parameters to favour the requisite result. However, favouring either speed, or resolution or accuracy usually means sacrificing one or both of the others, and the user is thus confronted with some sort of compromise in the data acquisition.
With Sensofar’s 3-in-1 approach – as found in the S line of surface profiler measurement systems – a single click in software switches the system to the best technique for the task at hand. The 3 measurement techniques found in the S lynx sensor head – confocal, vertical scanning interferometry & focus variation – thus each contribute critically to the versatility of the system, help minimise undesirable compromises in the data acquisition, and together provide Sensofar’s class-leading surface profiler measurement performance.
Confocal
Confocal profilers have been developed for measuring smooth to very rough surfaces. Confocal profiling provides the highest lateral resolution that can be achieved by an optical profiler. Thus, spatial sampling can be reduced to 0.01 μm, which is ideal for critical dimension measurements. High NA (0.95) and magnification
(150X) objectives are available to measure smooth surfaces with steep local slopes over 70° (for rough surfaces up to 86°). The proprietary confocal algorithms provide the unique vertical repeatability on the nanometre scale.
Interferometry
White-light vertical scanning interferometry (VSI) is a widely used and powerful technique for measuring surface characteristics such as topography or transparent film structure. It is best suited for measuring smooth to moderately rough surfaces, and provides nanometre vertical resolution regardless of the objective’s NA or magnification.
Focus Variation
Focus Variation is an optical technology that has been developed for measuring the shape of large rough surfaces. This technology is based on Sensofar’s extensive expertise in the field of combined confocal and interferometric 3D measurements, and is specifically designed to complement confocal measurements at low magnification. Highlights of the technology include high slope surfaces (up to 86°), highest measurement speeds (mm/s) and large vertical range. This combination of measurement capabilities is mainly used for tooling applications.
Interactive analysis tools
3D and 2D interactive views provide multiple scaling, display and render options. A comprehensive suite of tools for preliminary examination and analysis of 3D or 2D measurements is provided. Dimensions, angles, distances, diametres can be measured and features highlighted with new critical dimensions tools. All of these features make the new SensoSCAN an ideal software package for a broad range of analysis tasks. For applications requiring a more complete analysis suite, advanced analysis software packages are optionally available, SensoMAP and SensoPRO LT.
