S neox – 3D Optical Profilometer

The S neox outperforms existing optical 3D profiling microscopes in terms of performance, functionality, efficiency and design, providing Sensofar with a class-leading areal measurement system.

Designed as a high-performance 3D optical profiler from the outset, S neox outperforms all  existing optical profilers, combining 3 techniques – confocal (best for surfaces with high slope), interferometry (yields the highest vertical resolution) and Focus Variation (measure shape in mere seconds) – in the same sensor head without any moving parts.

For confocal scanning, the S neox uses Sensofar’s patented technology, based on a microdisplay. The ferroelectric liquid crystal on silicon (FLCoS) microdisplay is a fast switching device that makes the scanning of confocal images fast and very stable. Combining this approach with Sensofar’s high NA objectives (0.95), vertical resolution is reduced to below 1 nm. Additionally, as there are no moving parts in the sensor head, there are no maintenance and alignment issues, and the effective lifetime of the sensorhead is unlimited.

Key Features

  • Confocal scanning for high slope samples
  • Interferometry (PSI, ePSI, VSI) for the best vertical resolution
  • Focus Variation for surface shape
  • No moving parts
  • Red, green blue and white LEDs for compounded high resolution colour images with high colour fidelity
  • Thin film measurement; Transparent films from 50 nm to 1.5 μm can be measured in less than one second. Sample evaluation spot diameter is dependent on the objective magnification which can be as low as 0.5 μm and up to 40 μm.

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Faster than ever

Everything is faster than before with new smart and unique algorithms and a new camera. Data acquisition is taken at 180 fps. Standard measurement acquisition is 5X faster than before. Making the S neox 3D optical profilometer, the fastest areal measurement system in the market.

Easy to use

Sensofar is continuously working to provide the most incredible experience to our customers. With the fifth generation of the S neox 3D optical profilometer systems, the goal has been to make it easy to use, intuitive and faster. Even if you are beginner user, the system can be managed with just one click. Software modules have been created to adapt the system to the user requirements.

No moving parts

The confocal scanning technique implemented in Sensofar’s systems is a Microdisplay Scan Confocal Microscope (ISO 25178-607). The microdisplay creates a rapidly switching device
with no moving parts, making data acquisition fast, reliable and accurate. Due to this and the associated algorithms, Sensofar’s confocal technique yields a class-leading vertical resolution,
better than other confocal approaches and even better than laser scanning confocal systems.

Why 4-in-1 technologies?

Ai Focus Variation

Active illumination Focus Variation is an optical technology that has been
developed for measuring the shape of large rough surfaces. This technology is based on Sensofar’s extensive expertise in the field of combined confocal and interferometric 3D measurements, and is specifically designed to complement confocal measurements at low magnification. It has been  improved with the use of active illumination to get more reliable focus location even on optically smooth surfaces. Highlights of the technology include high slope surfaces (up to 86°), highest speed
(up to 3mm/s) and large vertical range measurements.


Confocal profilers have been developed to measure the surface height of smooth to very rough surfaces. Confocal profiling provides the highest lateral resolution, up to 0.15 μm line & space, with spatial sampling can be reduced to 0.01 μm, which is ideal for critical dimension measurements. High NA (0.95) and high magnification (150X) objectives are available to measure smooth surfaces with steep local slopes over 70° (for rough surfaces up to 86°). The proprietary confocal algorithms
provide vertical repeatability on the nanometre scale.


PSI Phase Shift Interferometry has been developed to measure the surface height of very smooth and continuous surfaces with sub-Angstrom resolution, for all numerical apertures (NA). Very
low magnifications (2.5X) can be employed to measure large fields of view with the same height resolution.
CSI Coherence Scanning Interferometry uses white light to scan the surface height of smooth to
moderately rough surfaces, achieving 1 nm height resolution at any magnification.

Thin Films

Thin film measurement technique measures the thickness of optically transparent layers quickly, accurately, non-destructively and requires no sample preparation. The system acquires the
reflectance spectrum of the sample in the visible range, and is compared with a simulated spectra calculated by the software, with layer thickness modification until the best fit is found. Transparent films from 50 nm to 1.5 μm can be measured in less than one second. Sample evaluation spot diameter is dependent on the objective magnification which can be as low as 0.5 μm and up to 40 μm.

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